High H2 sensing behavior of TiO2 films formed by thermal oxidation
โ Scribed by Youn-Ki Jun; Hyun-Su Kim; Jong-Heun Lee; Seong-Hyeon Hong
- Book ID
- 108263297
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 346 KB
- Volume
- 107
- Category
- Article
- ISSN
- 0925-4005
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๐ SIMILAR VOLUMES
Thin films of TiO 2 were grown on n-type Si substrate by thermal oxidation of Ti films deposited by dc sputtering. The phase purity of TiO 2 was confirmed by Raman spectroscopy, and secondary ion mass spectroscopy was used to analyze the interfacial and chemical composition of the TiO 2 thin films.
AbstractรPlastic relaxation of the stresses, produced by high-temperature oxidation and thermal contraction mismatch on cooling, decreases residual compression in the oxide. For this reason, slow cooling from the oxidation temperature is expected to have a beneยฎcial eect on spalling resistance of pr