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High Frequency Permeability of CoNbZr Thin Films Prepared by Tetrode Sputtering Method

✍ Scribed by Koyama, H.; Tsujimoto, H.; Shirae, K.

Book ID
119818186
Publisher
Institute of Electrical and Electronics Engineers
Year
1987
Weight
210 KB
Volume
2
Category
Article
ISSN
0882-4959

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## Abstract High‐frequency characteristics of a series of soft magnetic Fe–Co–B‐based thin films are investigated in the range of 0.5–5 GHz. It is found that in‐plane anisotropy can be caused by oblique incidence or applying an external field during deposition. The permeability and the resonance fr