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High frequency, inductively coupled plasma torch for pure and doped silica deposition

✍ Scribed by H. Berthou; V. Neumann; H.E. Hintermann

Book ID: 107930291
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 565 KB
Volume: 61
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(93)90220-i

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