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High frequencies characterization of Cu-MIM capacitors in parallel configuration for advanced integrated circuits

✍ Scribed by J. Piquet; C. Bermond; M. Thomas; B. Fléchet; A. Farcy; T.T. Vo; T. Lacrevaz; J. Torres; O. Cueto; G. Angénieux

Book ID: 108207673
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 296 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.10.028

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