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High energy Si ion irradiation effects on 10 nm thick oxide MOS capacitors

✍ Scribed by A. Candelori; A. Paccagnella; G. Raggi; J. Wyss; D. Bisello; G. Ghidini


Book ID
117144739
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
409 KB
Volume
280
Category
Article
ISSN
0022-3093

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