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High dielectric constant nickel-doped titanium oxide films prepared by liquid-phase deposition

โœ Scribed by Lee, Ming-Kwei; Yen, Chih-Feng; Fan, Cho-Han


Book ID
125345014
Publisher
Springer
Year
2014
Tongue
English
Weight
486 KB
Volume
116
Category
Article
ISSN
1432-0630

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High dielectric constant TiO2 film grown
โœ Ming-Kwei Lee; Hung-Chang Lee; Chih-Min Hsu ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 432 KB

In this study, titanium dioxide (TiO 2 ) films were grown on polycrystalline silicon by liquid phase deposition (LPD) with ammonium hexafluoro-titanate and boric acid as sources. The film structure is amorphous as examined by X-ray diffraction (XRD). A uniform composition of LPD-TiO 2 was observed b