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High-density silicon nitride thin film in PECVD

✍ Scribed by Brigitte Reynes; Jean Claude Bruyère

Book ID: 108028087
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 324 KB
Volume: 32
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(92)80003-l

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