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High-density DLC films prepared using a magnetron sputter type negative ion source

โœ Scribed by Paik, Namwoong


Book ID
121699665
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
450 KB
Volume
14
Category
Article
ISSN
0925-9635

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Transparent conducting indium tin oxide (ITO) thin films were prepared on glass substrates by a magnetron sputter type negative ion source which requires cesium (Cs) vapor injection for surface negative ionization on the ITO target surface. Although the film was prepared at 70 ยฐC, it attained high o