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Characteristics of Cu films prepared using a magnetron sputter type negative ion source (MSNIS)

✍ Scribed by Namwoong Paik

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 360 KB
Volume: 229
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.12.123

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