✦ LIBER ✦

High current ion implantation by plasma immersion technique

✍ Scribed by R.W. Thomae; B. Seiler; H. Bender; J. Brutscher; R. Günzel; J. Halder; H. Klein; J. Müller; M. Sarstedt

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma-immersion ion implantation

✍ Rainer W Thomae 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 138 KB

Nitrogen plasma immersion ion implantati

✍ S Mändl; E Richter; R Günzel; W Möller 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 246 KB

Buried oxide formation by plasma immersi

✍ J. Min; P.K. Chu; Y.C. Cheng; J.B. Liu; S. Im; S. Iyer; N.W. Cheung 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 384 KB

AlN nanoclusters formation by plasma ion

✍ E. Valcheva; S. Dimitrov; D. Manova; S. Mändl; S. Alexandrova 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 483 KB

Plasma immersion ion implantation of UHM

✍ H. Dong; T. Bell; C. Blawert; B. L. Mordike 📂 Article 📅 2000 🏛 Springer 🌐 English ⚖ 51 KB

Plasma immersion ion implantation of ste

✍ G.A. Collins; R. Hutchings; J. Tendys 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 632 KB