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High concentration diffusivity and clustering of arsenic and phosphorus in silicon

✍ Scribed by Solmi, S.; Nobili, D.

Book ID: 111860836
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 365 KB
Volume: 83
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.367008

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