High-aspect-ratio nanoporous membranes made by reactive ion etching and e-beam and interference lithography

✍ Scribed by Divan, Ralu; Makarova, Olga V.; Skoog, Shelby; Narayan, Roger; Sumant, Anirudha V.; Tang, Cha-Mei; Moldovan, Nicolaie

• Book ID: 121616724
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 462 KB
• Volume: 20
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-013-1932-7