Nanofabrication of sharp diamond tips by e-beam lithography and inductively coupled plasma reactive ion etching

✍ Scribed by N. Moldovan; R. Divan; H. Zeng; J. A. Carlisle

• Book ID: 121730303
• Publisher: AVS (American Vacuum Society)
• Year: 2009
• Tongue: English
• Weight: 998 KB
• Volume: 27
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.3263174