✦ LIBER ✦
Development of Sub-half Micrometric Structures with High Aspect Ratio Using a Multi-layer Lithography e-beam Process and Plasma Dry Etching
✍ Scribed by Mousinho, Ana Paula; Mansano, Ronaldo Domingues; Seabra, Antonio Carlos
- Book ID
- 126712829
- Publisher
- Taylor and Francis Group
- Year
- 2002
- Tongue
- English
- Weight
- 451 KB
- Volume
- 374
- Category
- Article
- ISSN
- 1542-1406
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