High aspect ratio, 3D structuring of photoresist materials by ion beam LIGA

✍ Scribed by F. Munnik; F. Benninger; S. Mikhailov; A. Bertsch; P. Renaud; H. Lorenz; M. Gmür

• Book ID: 114155507
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 415 KB
• Volume: 67-68
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(03)00064-9