𝔖 Bobbio Scriptorium
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High accuracy with vortex flow sensors


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
157 KB
Volume
2010
Category
Article
ISSN
0262-1762

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Sextant Avionique is currently developing a new family of micromachined silicon pressure sensors. The target accuracy is \(10^{-4}\) full scale. Therefore, the basic principle uses a vibrating concept. A membrane is stressed by the pressure and this activates a vibrating beam, the frequency of which