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Hexamethyldisiloxane film as the bottom antireflective coating layer for ArF excimer laser lithography

✍ Scribed by Chen, Hsuen-Li ;Wang, Lon A.

Book ID: 115348247
Publisher: The Optical Society
Year: 1999
Tongue: English
Weight: 108 KB
Volume: 38
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.38.004885

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