Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography

✍ Scribed by Jun, Byung-Hyuk ;Han, Sang-Soo ;Kim, Kyong-Sub ;Lee, Joon-Sung ;Jiang, Zhong-Tao ;Bae, Byeong-Soo ;No, Kwangsoo ;Kim, Dong-Wan ;Kang, Ho-Young ;Koh, Young-Bum

• Book ID: 115345802
• Publisher: The Optical Society
• Year: 1997
• Tongue: English
• Weight: 428 KB
• Volume: 36
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.36.001482