✦ LIBER ✦
A study on adhesion and footing issues of HMDSO films as bottom antireflective coating for deep UV lithographies
✍ Scribed by C.H Lin; H.L Chen; L.A Wang
- Book ID
- 114155305
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 169 KB
- Volume
- 57-58
- Category
- Article
- ISSN
- 0167-9317
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