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Heterogeneous processes of new phase growth in the system of various sinks: ion-beam synthesis of silicon oxynitride

✍ Scribed by M.Yu. Barabanenkov; A.F. Borun; A.B. Danilin

Book ID: 113283316
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 329 KB
Volume: 66
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(92)95996-5

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