✦ LIBER ✦

Helium ion bombardment induced amorphization of silicon crystals

✍ Scribed by V. F. Reutov; A. S. Sokhatskii

Book ID: 110131947
Publisher: SP MAIK Nauka/Interperiodica
Year: 2002
Tongue: English
Weight: 91 KB
Volume: 28
Category: Article
ISSN: 1063-7850
DOI: 10.1134/1.1498804

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

On the peculiarities of silicon amorphiz

On the peculiarities of silicon amorphization at ion bombardment

✍ Gerasimov, A. I. ;Zorin, E. I. ;Pavlov, P. V. ;Tetelbaum, D. I. 📂 Article 📅 1972 🏛 John Wiley and Sons 🌐 English ⚖ 881 KB

Ion-induced crystallization and amorphiz

Ion-induced crystallization and amorphization at crystal/amorphous interfaces of silicon

✍ Zhong-Lie Wang; Noriaki Itoh; Noriaki Matsunami; Q.T. Zhao 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 957 KB

Comparison between “intermediate”- and “

Comparison between “intermediate”- and “heavy”-ion-bombardment-induced silicon amorphization at room temperature

✍ A. Claverie; C. Vieu; J. Fauré; J. Beauvillain 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 541 KB

## Cross-sectional electron microscopy and related diffraction techniques have been applied to the characterization of argon-and xenon-bombardment-induced amorphization of silicon at room temperature. "Damage" calculations have been performed to provide a theoretical support to the observations. Com

Bubble formation on silicon by helium io

Bubble formation on silicon by helium ion bombardment

✍ Yamauchi, Y.; Hirohata, Y.; Hino, T.; Nishikawa, M. 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 491 KB

Electronic transport in ion-bombarded am

Electronic transport in ion-bombarded amorphous silicon

✍ R. Pfeilsticker; S. Kalbitzer; C. Müller 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 470 KB

Growth and crystallization of amorphous

Growth and crystallization of amorphous layers in silicon resulting from energetic ion bombardment

✍ G. Holmén; J. Linnros 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 450 KB