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Growth and crystallization of amorphous layers in silicon resulting from energetic ion bombardment

✍ Scribed by G. Holmén; J. Linnros

Book ID: 113278113
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 450 KB
Volume: 22
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(87)90153-4

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