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Helium-implanted silicon: A study of bubble precursors

✍ Scribed by Corni, F.; Calzolari, G.; Frabboni, S.; Nobili, C.; Ottaviani, G.; Tonini, R.; Cerofolini, G. F.; Leone, D.; Servidori, M.; Brusa, R. S.; Karwasz, G. P.; Tiengo, N.; Zecca, A.

Book ID: 120191379
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 385 KB
Volume: 85
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.369335

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