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Early stages of bubble formation in helium-implanted (100) silicon

✍ Scribed by Pivac, B. ;Milat, O. ;Dubček, P. ;Bernstorff, S. ;Corni, F. ;Nobili, C. ;Tonini, R.


Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
320 KB
Volume
198
Category
Article
ISSN
0031-8965

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