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Hardness of C, CNx and AlN thin films after rapid thermal annealing

✍ Scribed by G. Beshkov; G.P. Vassilev; M.R. Elizalde; T. Gomez-Acebo

Book ID
114193709
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
315 KB
Volume
82
Category
Article
ISSN
0254-0584

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