✦ LIBER ✦

Hard hydrogenated carbon films with low stress

✍ Scribed by Lacerda, R. G.; Marques, F. C.

Book ID: 118733878
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 372 KB
Volume: 73
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.121874

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical properties of hydrogenated hard

Optical properties of hydrogenated hard carbon thin films

✍ A. Bubenzer; B. Dischler; A. Nyaiesh 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 326 KB

The mechanical properties of hydrogenate

The mechanical properties of hydrogenated hard carbon films

✍ Nobuki Mutsukura; Shōtarō Tomita; Yoshie Mizuma 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 477 KB

Stress reduction for hard amorphous hydr

Stress reduction for hard amorphous hydrogenated carbon thin films deposited by the self-bias method

✍ Hideo Yamada; Osamu Tsuji; Peter Wood 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 593 KB

Hard-hydrogenated tetrahedral amorphous

Hard-hydrogenated tetrahedral amorphous carbon films by distributed electron cyclotron resonance plasma

✍ F. Piazza 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 314 KB

Thick stress-free amorphous-tetrahedral

Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond

✍ Friedmann, T. A.; Sullivan, J. P.; Knapp, J. A.; Tallant, D. R.; Follstaedt, D. 📂 Article 📅 1997 🏛 American Institute of Physics 🌐 English ⚖ 314 KB

Nanostructured hydrogenated amorphous ca

Nanostructured hydrogenated amorphous carbon films doped with nitrogen on p-silicon

✍ Somani, Prakash R. ;Yoshida, Akihiko ;Afre, Rakesh A. ;Adhikary, Sunil ;Soga, T. 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 437 KB

## Abstract The synthesis of nanostructured hydrogenated amorphous carbon (a‐C:H) films doped with nitrogen using microwave‐assisted surface wave plasma chemical vapour deposition on quartz and p‐silicon substrates is reported. By controlling the deposition parameters, the Tauc band gap has been va