✦ LIBER ✦
Stress reduction for hard amorphous hydrogenated carbon thin films deposited by the self-bias method
✍ Scribed by Hideo Yamada; Osamu Tsuji; Peter Wood
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 593 KB
- Volume
- 270
- Category
- Article
- ISSN
- 0040-6090
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