Handbook of compound semiconductors: growth, processing, characterization, and devices

✍ Scribed by Paul H Holloway; Gary E McGuire

• Publisher: Park Ridge, NJ Noyes
• Year: 1995
• Tongue: English
• Leaves: 918
• Series: Materials science and process technology series
• Category: Library

✦ Synopsis

This book reviews the recent advances and current technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides a complete overview of the technologies necessary to grow bulk singlecrystal substrates, grow heteroor homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc

✦ Table of Contents

Content: Bulk Crystal Growth --
MOCVD of Compound Semiconductor Layers --
Molecular Beam Epitaxy --
Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials --
Surface Processing of IIIV Semiconductors --
Ion Implantation Induced Extended Defects in GaAs --
Passivation of GaAs and InP --
Wet and Dry Etching of Compound Semiconductors --
Rapid Isothermal Processing (RIP) --
Epitaxial LiftOff for Thin Film Compound Semiconductor Devices --
Packaging --
Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by Xray Photoelectron Spectroscopy and Diffraction Techniques --
Characterization of Compound Semiconductor Material by Ion Beams --
Optical Characterization of Compound Semiconductors --
Gallium Arsenide Microelectronic Devices and Circuits --
Optoelectronic Devices --
Acknowledgments --
References --
Index.
Abstract: This book reviews the recent advances and current technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides a complete overview of the technologies necessary to grow bulk singlecrystal substrates, grow heteroor homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc