Handbook of Compound Semiconductors - Growth, Processing, Characterization, and Devices

✍ Scribed by Holloway, P.H.; McGuire, G.E.(eds.)

• Publisher: William Andrew Publishing/Noyes
• Year: 1995
• Tongue: English
• Leaves: 709
• Category: Library

✦ Synopsis

This book reviews the recent advances and current technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides a complete overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero- or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc.

✦ Table of Contents

Content:
Front Matter
• Preface
• Table of Contents
1. Bulk Crystal Growth
2. MOCVD of Compound Semiconductor Layers
3. Molecular Beam Epitaxy
4. Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials
5. Surface Processing of III-V Semiconductors
6. Ion Implantation Induced Extended Defects in GaAs
7. Passivation of GaAs and InP
8. Wet and Dry Etching of Compound Semiconductors
9. Rapid Isothermal Processing (RIP)
10. Epitaxial Lift-off for Thin Film Compound Semiconductor Devices
11. Packaging
12. Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction Techniques
13. Characterization of Compound Semiconductor Material by Ion Beams
14. Optical Characterization of Compound Semiconductors
15. Gallium Arsenide Microelectronic Devices and Circuits
16. Optoelectronic Devices
Index