Hafnium aluminum oxide as charge storage and blocking-oxide layers in SONOS-type nonvolatile memory for high-speed operation

✍ Scribed by Yan Ny Tan; Chim, W.K.; Wee Kiong Choi; Moon Sig Joo; Byung Jin Cho

• Book ID: 114618155
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 363 KB
• Volume: 53
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2006.870273