H^+ lithography for 3-D integration of optical circuits
β Scribed by Brenner, Karl-Heinz ;Frank, Michael ;Kufner, Maria ;Kufner, Stefan
- Book ID
- 115341045
- Publisher
- The Optical Society
- Year
- 1990
- Tongue
- English
- Weight
- 678 KB
- Volume
- 29
- Category
- Article
- ISSN
- 1559-128X
No coin nor oath required. For personal study only.
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