Fabrication of a 3D Nanoscale Crossbar Circuit by Nanotransfer-Printing Lithography

✍ Scribed by Colin Stuart; Hee-Kun Park; Yong Chen

• Book ID: 104593465
• Publisher: John Wiley and Sons
• Year: 2010
• Tongue: English
• Weight: 469 KB
• Volume: 6
• Category: Article
• ISSN: 1613-6810
• DOI: 10.1002/smll.201000514

✦ Synopsis

Abstract

Nanotransfer‐printing lithography simplifies the fabrication of a 3D nanoscale crossbar circuit. Gold nanowires 100 nm in width and with 100 nm spacing are printed onto a polymer layer of electrically switchable, LiClO~4~‐doped poly[2‐methoxy‐5‐(2′‐ethylhexyloxy)‐p‐phenylene vinylene] mixed with an epoxy. The transfer process can be repeated to obtain a multilayer nanoscale crossbar structure. This process paves the way toward fabricating 3D circuits with ultrahigh device density and neuromorphic architectures.