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Growth of the AlN nano-pillar crystal films by means of a halide chemical vapor deposition under atmospheric pressure

โœ Scribed by Masayuki Yoshioka; Naoyuki Takahashi; Takato Nakamura


Book ID
113780779
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
224 KB
Volume
86
Category
Article
ISSN
0254-0584

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