✦ LIBER ✦

Growth of tantalum boron nitride films on Si by radio frequency reactive sputtering: effect of N2/Ar flow ratio

✍ Scribed by Shun-Tang Lin; Chiapyng Lee

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The effect of substrate temperature on t

✍ Hsyi-En Cheng; Chien-Tang Mao 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 171 KB

Effect of N2-gas flow rates on the struc

✍ Li, Xing’ao; Bai, Qiufei; Yang, Jianping; Li, Yongtao; Wang, Lixia; Wang, Haiyun 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 311 KB

Effect of gas flow ratio on the microstr

✍ Z.C. Jia; J.Q. Zhu; C.Z. Jiang; W.X. Shen; J.C. Han; R.R. Chen 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 675 KB

Effect of nitrogen flow ratio on structu

✍ SHAHAB NOROUZIAN, MAJID MOJTAHEDZADEH LARIJANI, REZA AFZALZADEH 📂 Article 📅 2012 🏛 Springer-Verlag 🌐 English ⚖ 221 KB