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Effect of nitrogen flow ratio on structure and properties of zirconium nitride films on Si(100) prepared by ion beam sputtering

โœ Scribed by SHAHAB NOROUZIAN, MAJID MOJTAHEDZADEH LARIJANI, REZA AFZALZADEH

Book ID
118821939
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
221 KB
Volume
35
Category
Article
ISSN
0250-4707

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