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Growth of single-crystalline silicon films on insulating substrates

โœ Scribed by W. Scharff; K. Hoeppner

Book ID
112998187
Publisher
Springer-Verlag
Year
1987
Tongue
English
Weight
684 KB
Volume
61
Category
Article
ISSN
1219-7580

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Epitaxial growth of AlN films on single-
Epitaxial growth of AlN films on single-crystalline Ta substrates
โœ S. Hirata; K. Okamoto; S. Inoue; T-W. Kim; J. Ohta; H. Fujioka; M. Oshima ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 587 KB

We have demonstrated the first epitaxial growth of AlN films on single-crystalline Ta substrates by the use of a low-temperature growth technique based on pulsed laser deposition (PLD). Although previous AlN films grown on Ta( 100) and ( 111) substrates have exhibited quite poor crystallinity, an ep