Control of crystallinity of microcrystalline silicon film grown on insulating glass substrates

✍ Scribed by Jiang-Huai Zhou; Kazuyuki Ikuta; Tetsuji Yasuda; Takahide Umeda; Satoshi Yamasaki; Kazunobu Tanaka

• Book ID: 117148917
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 143 KB
• Volume: 227-230
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(98)00199-9