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Growth of highly textured yttria-stabilized zirconia thin film by reactive magnetron sputtering

โœ Scribed by Z. Ji; J. M. Rigsbee

Book ID
110296098
Publisher
Springer
Year
2001
Tongue
English
Weight
944 KB
Volume
20
Category
Article
ISSN
0261-8028

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Electrical and structural properties of
Electrical and structural properties of zirconia thin films prepared by reactive magnetron sputtering
โœ K.P.S.S. Hembram; Gargi Dutta; Umesh V. Waghmare; G. Mohan Rao ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 819 KB

Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp