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Material properties of heteroepitaxial yttria-stabilized zirconia films with controlled yttria contents on Si prepared by reactive sputtering

โœ Scribed by S Horita; M Watanabe; S Umemoto; A Masuda


Book ID
108390466
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
338 KB
Volume
51
Category
Article
ISSN
0042-207X

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