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Growth of highly disordered InGaP on (100) GaAs by molecular beam epitaxy with a GaP decomposition source

✍ Scribed by J.D. Song; J.M. Kim; Y.T. Lee


Book ID
106024027
Publisher
Springer
Year
2001
Tongue
English
Weight
267 KB
Volume
72
Category
Article
ISSN
1432-0630

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Growth of highly (0001)-oriented aluminu
✍ K JΓ€rrendahl; SA Smith; T Zheleva; RS Kern; RF Davis πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 403 KB

## Aluminum nitride thin films with very smooth surfaces have been grown by gas-source molecular beam epitaxy on 4H and 6H silicon carbide substrates. High purity ammonia was used as the nitrogen source in conjunction with Al evaporated from an effusion cell. Streaked reflection high energy electr