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Growth of high resistance thick GaN templates by HVPE

✍ Scribed by R. B. Jain; R. S. Q. Fareed; J. Zhang; R. Gaska; E. Kuokstis; J. Yang; H. P. Maruska; M. A. Khan; J. Mickevicius; G. Tamulaitis; M. S. Shur


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
213 KB
Volume
2
Category
Article
ISSN
1862-6351

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## Abstract The crystallographic structures of the various Metalorganic Vapour Phase Epitaxy (MOVPE) thin GaN epitaxial layers deposited on (00.1) sapphire substrates are described and compared with the structural properties of the thick gallium nitride layers deposited by Hydride Vapour Phase Epit