Growth of b-axis oriented VO2 thin films on glass substrates using ZnO buffer layer

✍ Scribed by Te-Wei Chiu; Kazuhiko Tonooka; Naoto Kikuchi

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 285 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.04.097

✦ Synopsis

VO 2 thin films are grown on glass substrates by pulsed laser deposition using vanadium metal as a target. In this study, a ZnO thin film was used as a buffer layer for the growth of VO 2 thin films on glass substrates. X-ray diffraction studies showed that the VO 2 thin film had b-axis preferential orientation on a c-axis oriented ZnO buffer layer. The thickness of the ZnO buffer layer and the oxygen pressure during VO 2 deposition were optimized to grow highly b-axis oriented VO 2 thin films. The metal-insulator transition properties of the VO 2 film samples were investigated in terms of infrared reflectance and electrical resistance with varying temperatures.