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Growth of AlN Films as a Function of Temperature on Mo Films Deposited by Different Techniques

โœ Scribed by Yang, Jie; Jiao, Xiangquan; Zhang, Rui; Zhong, Hui; Shi, Yu; Du, Bo

Book ID
121573454
Publisher
Springer US
Year
2013
Tongue
English
Weight
773 KB
Volume
43
Category
Article
ISSN
0361-5235

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