Growth of AIN on Etched 6H-SiC(0001) Substrates via MOCVD

✍ Scribed by Hageman, W. ;Xie, Z. ;Edgar, J. ;Zhuang, D. ;Jagganathan, S. ;Chaudhuri, J. ;Rys, A. ;Schmitt, J.

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 90 KB
• Volume: 188
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200112)188:2<783::aid-pssa783>3.0.co;2-w