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Growth and properties of alumina films obtained by low-pressure metal–organic chemical vapor deposition

✍ Scribed by Dong-Hau Kuo; Bo-Yu Cheung; Ren-Jye Wu


Book ID
117226578
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
920 KB
Volume
398-399
Category
Article
ISSN
0040-6090

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