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Preparation and characterization of thin films of alumina by metal-organic chemical vapor deposition

✍ Scribed by J. Fournier; W. DeSisto; R. Brusasco; M. Sosnowski; R. Kershaw; J. Baglio; K. Dwight; A. Wold


Book ID
113187784
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
312 KB
Volume
23
Category
Article
ISSN
0025-5408

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