Growth and electrical properties of the (Si/Ge)-on-insulator structures formed by ion implantation and subsequent hydrogen-assisted transfer

✍ Scribed by I. E. Tyschenko; M. Voelskow; A. G. Cherkov; V. P. Popov

• Book ID: 111444217
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 269 KB
• Volume: 43
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782609010114