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Growth and characterization of polycrystalline Si films prepared by hot-wire chemical vapor deposition

✍ Scribed by Dong-Sing Wuu; Shui-Yang Lien; Hsin-Yuan Mao; Bing-Rui Wu; In-Cha Hsieh; Pin-Chuan Yao; Jui-Hao Wang; Wen-Chun Chen

Book ID: 108288917
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 211 KB
Volume: 498
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.07.054

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