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Growth and characterization of chromium oxide coatings prepared by pulsed-direct current reactive unbalanced magnetron sputtering

โœ Scribed by Harish C. Barshilia; K.S. Rajam


Book ID
108063746
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
879 KB
Volume
255
Category
Article
ISSN
0169-4332

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Cr-Si-N thin films were deposited by pulsed DC reactive dual-magnetron sputtering using Cr and Si targets, while various currents applied to the Si target allowed one to vary the Si content (C Si ) in the films. Microstructure, composition and mechanical properties were studied as a function of C Si