Growth and performance characteristics o
β
A. Kumar; R.P. Agarwal; R. Singh
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Article
π
1988
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Elsevier Science
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English
β 320 KB
The fabrication of MOS structures using an improved wet anodisation technique at low temperature, together with electrical and interfacial properties of the grown films are discussed. The thin films, of the order of 300 A thick, grown by anodic oxidation, have characteristics comparable with those o